Standard End Block

Standard End Block

  • Widely used in the large area coating industry
  • Used in high-power wide-substrate applications
  • Customizable for most applications
  • Horizontal¬†or¬†vertical use
  • Can be configured for use with on-line adjustable magnet bar technology
  • Can be combined with several components (e.g. magnet bar, elongation parts, sputter electronics, gas distribution and control systems) to obtain accurate process control
  • Easy to install
  • Rapid target exchange
  • Double vacuum and water sealing to avoid unplanned coater stops
  • Proven reliability

Driven Head

  • Water cooling
  • Electrical power
  • Rotatable vacuum sealing
  • Bearing
  • Isolation
  • Magnet bar support

Driving Head

  • Target rotation
  • Rotatable vacuum sealing
  • Bearing
  • Isolation
  • Magnet bar support

 

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