Compact End Block

Compact End Block

  • Widely used in applications where space is a constraint
  • Ideal for mid-to-low-power applications in new or existing coaters
  • Customizable for most applications
  • Can be adapted for heated coaters
  • Can be configured for use with on-line adjustable magnet bar technology
  • Horizontal, vertical or tilted use
  • DC, pulsed DC and MF switching at medium power levels
  • Can be combined with several components (e.g. magnet bar, elongation parts, sputter electronics, gas distribution and control systems) to obtain accurate process control
  • Flexibility in setting the appropriate target-substrate distance
  • Completely dismountable for easy maintenance
  • Easy to install
  • Rapid target exchange
  • Double vacuum and water sealing to avoid unplanned coater stops
  • Proven reliability
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