Components

Components

Rotatable Magnetrons

  • Standard end block
  • VAC-MAG® end block
  • Compact end block
  • Axial magnetrons

 

Planar Magnetrons

  • HLK 7® cathode body
  • PL 44® cathode body
  • HRC® cathode body
  • OAPC® cathode body

 

Magnet Bars

 

Integration Components

  • Gas distribution
  • Control cabinets
  • Cathode shield sets
  • Coater shield sets
  • Coater spare parts

 

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