News and Events

Film Properties of Zirconium Oxide Top Layers From Rotatable Targets

Authors:

  • J. Oberste-Berghaus, Soleras Advanced Coatings, Deinze BE
  • R. Van Nueffel, Soleras Advanced Coatings, Deinze BE
  • K. De Jaeger, Soleras Advanced Coatings, Deinze BE
  • A. Das, Soleras Advanced Coatings, Deinze BE
  • W. De Bosscher, Soleras Advanced Coatings, Deinze BE

Abstract:
Zirconium oxide thin films were deposited by dual magnetron AC sputtering from rotary cathodes, using both metallic zirconium and novel ceramic zirconium oxide targets. It was found that the ceramic targets can alleviate the severe hysteresis behavior and allows three times higher film deposition rates over the poisoned metal case. Resulting optical and mechanical ZrO2 film properties were found to be similar, with absorption coefficients below ~5•10-4 @550nm and hardness of ~10 GPa; making the oxide targets an attractive alternative over the metal counterpart for low-e glass applications. The refractive index correlates with the film hardness and elastic modulus, which, in turn, was related to the compactness of the columnar crystal structure of the films. It was inferred that film densification and compaction was influenced by the degree of O ion bombardment during film growth. In scratch testing, the ZrO2 coatings effectively protected the underlying glass substrate by virtue of high toughness and low friction coefficient, substantially outperforming standard Si3N4 coatings.

Published: 2015 Technical Conference Proceedings, Large Area Coating (October 7, 2015)

DOI: dx.doi.org/10.14332/svc15.proc.1944

Download:  Film Properties of Zirconium Oxide Top Layers from Rotatable Targets

Document Info: Adobe Acrobat Format, 1588 KB

Wilmert De Bosscher Elected Director of SVC Board

Materials Park, OH USA – November 14, 2016 – Wilmert De Bosscher, Chief Technology Officer of Soleras Advanced Coatings, was selected by the electorate of the Society of Vacuum Coaters to serve as director of the SVC Board for the 2017 – 2020 term.

De Bosscher holds a PhD in Solid State and Plasma Physics from Ghent University and has been a frequent contributor, presenter and moderator at the annual SVC TechCon event supporting technical programs for large area coatings.

The mission of the Society of Vacuum Coaters is to “promote technical excellence by providing a global forum to inform, educate and engage members, the technical community and the public on all aspects of vacuum coating, surface engineering and related technologies.”

Soleras Advanced Coatings is a leading global provider of advanced materials and solutions used in the deposition of thin film coatings. Soleras’ products are used in a wide variety of applications including high performance architectural glass, flat panel and touchscreen displays, electrochromic glass and solar PV panels.

Wilmert De Bosscher Wins Prestigious Industry Award

Naples, FL USA – October 28, 2015 – Wilmert De Bosscher, Chief Technology Officer of Soleras Advanced Coatings, won the John Matteucci Award for Technical Excellence in Vacuum Web Coating presented at the 2015 AIMCAL Web Coating and Handling Conference USA / FlexPackCon.

The Association of International Metallizers, Coaters and Laminators and the Society of Plastics Engineers recognized De Bosscher’s paper “New Rotatable Magnetrons and Target Materials Enabling Higher Performance Sputter Coatings” for its “breadth of subject, technical content, presentation style and future impact on technology or the marketplace.”

“It was a great honor for Wilmert to receive this award as it is one of the highest accolades in the coating world,” said Jeff Edel, Soleras’ CEO. “Soleras Advanced Coatings is dedicated to advancing coating technology and it’s exciting to see this recognized by AIMCAL.”

De Bosscher holds a PhD in Solid State Physics and Plasma Physics from Ghent University and has been active in the vacuum coating industry for more than 30 years. He has been instrumental in the introduction of rotatable magnetron sputtering technology into the glass coating industry.

A result of Soleras’ focus on innovations to advance sputter coating technology is the development of a revolutionary online adjustable magnet bar that allows, for the first time, computer-controlled tuning of the magnetic field in a coater to provide for optimal film uniformity. The tuning can be performed while the coater continues to sputter and remains fully operational.

Soleras Advanced Coatings is a leading global provider of advanced materials and solutions used in the deposition of thin film coatings. Soleras’ products are used in a wide variety of applications including high performance architectural glass, flat panel and touchscreen displays, electrochromic glass and solar PV panels.

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