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Magnetron Sources Soleras offers
cost-effective magnetron design, repair, and consultation services.
Soleras has original magnetron designs and can provide custom solutions
since end products and systems differ for most customers. Soleras is in
touch with the latest technology to provide the best solution for the
process requirements. For more information on the complete line of
magnetron sources, please call.
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| Basic Design Philosophy Soleras Magnetron Sputter Sources are constructed for production use and abuse. Our engineers are familiar with common problems found in many sputter sources. Soleras makes every effort to ensure that stainless steel is used in all critical areas, such as tapped holes and o-ring seal locations. Cooling plates are fabricated from oxygen free copper and feature turbulent flow patterns to ensure maximum heat transfer from hot target surfaces. Insulators are made from high temperature plastic to inhibit melting and deformation. Soleras will design and build a sputter source that will meet your quality and performance needs. Magnet Design Depending upon the application, Soleras will choose magnetic materials that suit a particular process requirement. Magnet choices are influenced by: target material type, thickness, process operating parameters, and physical size limitations. Soleras magnetron designs feature magnet assemblies outside the cooling water environment (to prevent corrosion) and permanently potted magnets to ensure proper orientation and placement. All Soleras magnet designs are computer simulated before construction to ensure magnetic field strengths, erosion patterns, and ionization rate will meet the requirements. Quality & Qualification All components must pass rigid quality specifications at multiple points during production. After approval, components are cleaned and assembled. All sealing components are leak checked, and magnetic strengths are verified. Laboratory testing and burn-in certification is available to verify design parameters (for designs up to 30” long). Uniformity and rate can be demonstrated before delivery. Individual testing requirements are often developed for unique processes, to ensure complete satisfaction. |
