Sputter Deposition Testing
Soleras LTD. maintains multiple in-house systems used for live sputter testing of sputtering targets, materials and cathodes. Our primary system includes the following features for extensive testing;
- a high vacuum turbo molecular pumping system
- gas flow and pressure controllers
- mixed ratio gas controls
- a load lock for the introduction of samples
- rotary feed thrus for sample rotation
- computerized data logging
- remote access for off-hours, long term test monitoring
- DC sputtering capabilities up to 20 kw
- a library of various target materials and types
Our systems are capable of sputtering rotary targets, small round planar targets (150mm dia) and small to mid sized rectangular planar targets (up to 1350mm). Other features at our disposal are; large pallet area for multiple samples, RF Etching capabilities and a chamber for testing internal mount cathodes.
It is these capabilities that help us to best insure that our new target manufacturing processes and materials are tested and proven out before being implemented into our product line.